MEMS Mass Flow sensors

Application domain(s)

  • Aerospace & Aeronautics
  • Automotive
  • Domotics (Smart Home)
  • Industry 4.0

Area(s) of expertise

  • Facilities & Labs
  • MEMS & Microsystems

Description

  • Mass Flow sensor for microthruster in space applications
  • Applications focused to safety and also to decrease the amount of emissions produced by aircraft/car engines
  • It can be integrated with gas sensors on chip

Advantages & Applications

Actual system proven in operational environment (competitive manufacturing in the case of key enabling technologies; or in space)

Specifications

The flow sensor, fabricated on a 2 x 3 mm2 silicon chip, provides the actual mass flow rate detecting the “temperature unbalance” in presence of the gas mass flow

Status

TRL 9 – actual system proven in operational environment (competitive manufacturing in the case of key enabling technologies; or in space)